SUPPORT

In Semiconductor

  • Requirement for High-k material
    - Leakage currents ↓ → Large band gap
    - Thermal & chemical stability
    - Appropriate characteristics with electrodes
  • Available High-k materials
    - AI2O3,HfO2,ArO2,Ta2O5,etc.
    - Doping with various atoms (Si, Ge, rare earth elements, etc.)

In Display

  • Low temperature ALD for flexible device
    - Channel materials : ZnO, ZnO:N, etc.
    - Gate insulator : Al2O3, SiO2, etc.

  • TCO for transparent TFT
    - ZnO based electrode
    - Ga, In doped ZnO for TCO

Emerging Oxide

  • Photocatalytic decomposition
    - Decomposition of organics using photocatalyst (TiO2)
    - Self-cleaning applications

  • Hydrophobic coatings
    - Hydrophobic rare-earth oxides (Er2O3, Y2O3, La2O3, Dy2O3, CeO2, etc. )
    - Applied to clothes, water aggregators, wings of airplane, oil/water separator