SUPPORT

Geim et al, Nature, 499, 419-425, (2013)

New materials for advanced application beyond graphene

  • Transition Metal Dichalcogenides (TMDCs)

Applications

  • Photodiode

    CH. Lee et al, Nature nanotech, 9, 676, (2014)

  • Logic circuits

    H. Wang et al, Nano Lett,, 12(9), 4674–4680, (2012)

  • Gas sensor

    F. K. Perkins et al, Nano Lett, 13(2), 668-673, (2013)

  • Catalyst

    Thomas F. Jaramillo et al, Science, 317, 100-102, (2007)

  • Various applications using TMDCs → Optoelectronic, Electronic, Energy, etc…
  • Research about 2D material is rapidly increasing

Synthesis & Equipment

  • ALD based 2D TMDCs

  • CVD based 2D TMDCs

  • ALD based process is advantageous for control of the layer number.
    - I TECH U has excellent ALD 2D material process technique. (MoS2, WS2, WSe2 etc…)
  • High synthesis temperature > 500 °C
    - High temperature device is required for 2D material process
    - I TECH U has superior technique producing high temperature ALD device (Over 500 ℃ )