SUPPORT
IC Series
Model IC - 10
Specification
| Chamber Type | Tube type( 2 ~ 8 inch) |
|---|---|
| Substrate Temperature | Up to 450 ℃ |
| Precursor sources | Up to 3 |
| Reactant | H2O , O3 , O2 , NH3 Gas & Plasma |
| Equipment size | 1500 × 1000 × 1500 mm |
| Control system | PC control (auto) |
*Available for attaching loadlock chamber.
ISH Series
MODEL : ISH-10
Specification
| Chamber Type | Wafer(shower head) type( 6 inch) |
|---|---|
| Substrate Temperature | Up to 450 ℃ |
| Precursor sources | Up to 3 |
| Reactant | H2O , O3 , O2 , NH3 Gas & Plasma |
| Equipment size | 1500 × 1200 × 1500 mm |
| Control system | PC control (auto) |